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(扩散炉)Tempress system install flow chart




Kromax international (ShangHai) Corp

Tempress System Installation Work
The Tempress Diffusion system is a modular horizontal furnace designed to process (silicon)wafers as part of the manufacturing technology of semiconductor, optical, MEMS and solar devices.

Table of Contents
1 2 Tempress system mainly installation flow chart Specific operation and related procedure

3 Appendix

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Tempress system mainly installation flow chart
系统移机(1 天)

系统各部分(Furnace,Load Station.Gas Cabinet,Power Cabinet)的定位,水平调整(1 天)

安装热排,酸排,灯架及 Parts 清点(1 天)

外围厂务工作开始(冷却水,热酸 排风,N2,O2,Air) 完成时间根据客户实际情况

机台内部线路连接(2 天)

如车间洁净度许可,可拆除一些包 装,并安装排风过滤网(半天)

Dubble Check 后机台开电 通知客户准备 Dummy Wafer 调 桨和做 Profile, Saturation run

石英炉管和门的安装及调整(2 天)

尾气瓶,尾气管及其附属设施的安装,Paddle TC,Spike TC 的安装(1 天)

Paddle 的安装和调整(2 天)

Profiling(2 天)

Saturation run(2 天)

生产工艺调整(2 天)

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注: 1: 所有操作时间按单台 2 人计算 2: 厂务期间,为安全起见,一般不进行安装活动 Specific operation and related procedure 一 系统移机
一般由搬运公司负责,我们要做的是检查包装箱体有无损坏,货物是否有缺少

System move-in and assemble procedure 1. preparation the tool:hydraulic forklift,crowbar(2),jack(4) and ladder(2). 准备工具:液压铲车,撬棒 2 根,千斤顶 4 个,梯子 2 个.

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2.machine move to the FAB 将设备搬入 FAB

3.machine location :furnace module location at first,because the position of furnace module is the most important.then locate the laod station and gas cabinet , height of the support foot is 8cm, the gap is

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<0.5cm between the furnace, laod station and gas cabinet. 设备定位:先对炉管单元进行定位,因为炉管单元的位置是最重要的.接着是对 laod station 和 gas cabinet 进行定位, 支撑脚高度为 8cm, Furnace laod station 和 gas cabinet 之间的间隙要小于 0.5cm.

gas cabinet Furnace laod station

Gap <0.5cm

Gap <0.5cm

support foot
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4. leveling measure by gradienter and adjust the support foot the machine leveling(spec 0 土 0.1) 用水平仪测量设备水平,并调节支撑脚来调节水平(规格为 0 土 0.1)

to adjust

5.power cabinet location. 电源箱定位.

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二 系统各部分(Furnace,Load Station.Gas Cabinet,Power Cabinet)的定位和水 平调整
1 根据客户提供的 Layout,进行初步定位 2 先定位炉体部分 a) 选择墙体,或其他机台做为参照物,并结合客户要求的机台间隔距离定位 b) 支撑脚调到 8cm 左右, c) 炉体水平度要精确到 0 度+/-0.1 度,垂直度要精确到 90 度+/-0.1 度 3 Load Station.Gas Cabinet 那个先定位都可以,但要注意: a) 保证结合部分间隙<0.5cm, b) 保证地面与炉体的水平,特别是 Load Station 部分,一定不能和炉体有高低落差 c) 水平度和垂直度的要求同炉体 移动机台时,要防止刮蹭,机台倾倒,特别是有 Cable 的部分要注意,防止扯断

三 安装热排,酸排,灯架及 Parts 清点
热排大约 300KG,要抬到 3.5m 的机台上,需要找好结实的梯子,和足够的人员,注意安全.

四 机台内部线路连接
线路连接,要仔细参照 Manual,并要防止野蛮操作 以下为System wiring 的说明,FYI 1. 确认待接模组号码

模组号码为 XG1

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2. 按照模组号码在Manual上查找到相对应的待接模组

XG1

3. 按照Manual上所对应的点和相对应的线去进行接线工作.

对应的点位

对应的线

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对应的线

对应的点位

4.按照上述方法去完成每个模组的接线工作.

五 如车间洁净度许可,可拆除一些包装,并安装排风过滤网
排风过滤网的安装要注意不要损坏框架周围的密封胶圈

六 Dubble Check 后机台开电
注意检查所有电源线是否反相 注意检查应急开关(EMO)的功能正常 注意检查 Touch Screen 显示正常

七 石英炉管和门的安装及调整
石英制品是易碎品,要注意轻拿轻放 为防止污染,操作时要戴无尘手套 炉管,炉门的安装要遵造 procedure

以下为关于Tube Installation 的说明,FYI 1. Cool the system down to room temperature.
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系统冷却,如果需要的话 2. Open the door to the heating element and pull the Thermocouples 5 cm out. 打开门,并把Spike TC 拉出, 3: Remove the tube adapters and the insulating endcap and stainless steel radiation shield. 把前后两面的石棉盖板和不锈钢盖板拿下 4: Pull the process tube gently, 2 engineers should be present to guide the tube, and assure it does not scratch. 这个工作至少需要2 人,一人在前面指引方向,后面的人把炉管要轻轻的推进,前面的人注意有 无 碰到炉体,要及时通报,以便能及时调整推进的方向和力度,直到炉管伸出炉体, 注意: 炉管伸出的部分应为炉体的不锈钢盖板到石英门轴的距离,请看下图,

此距离大约4cm,因此安装炉管时,伸出部分的长度控制在4cm+/-2mm 这一点非常重要,如果伸出部分长度不一,如果下一次更换炉管,与以前的长度不一致,那么可能 造 成: 1: 炉门密封不好;影响工艺 2: 甚至炉门与炉口发生相撞 3: 后续工程师难以维护 以下为关于Quartz Door Installation 的说明,FYI

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以下为关于DMC Calibration的说明,FYI When the paddle or quartz door move abnormally, or we change the DMC card, we need do DMC calibration and test. (当paddle 或者炉门运动异常,或者更换DMC card 时我们做DMC 校正和测试) 1.Turn off the power supply (see below picture). (拔掉电源)

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2. Turn the Gain of the adjusting knob to “0”. (调整增益旋钮到“0”档位)

3. Turn on power supply and the lamps will flash. This means 渎雁银詫颠E渎雁银詫颠tum. If the ERR lamp flashes, it means having an error. (接通电源后指示灯会闪烁,此时意味着正在清除以 前的数据。如果报警指示灯闪烁,意味着此时出现错误) 4. Turn off the power supply after 30s. (在30 秒后拔掉电源) 5. Turn the Gain of the adjusting knob from “0” to “7”. (把增益旋钮从“0”档位调到“7”档位) 6. Turn on the power supply. (接通电源) 7. Select the “TEST” recipe. Enter 2550&500 value in the VERIABLE PROCESS COMMAND and start the recipe, then the machine will calibrate automatically. But we need see the calibrating status in the SEVRO DRIVER STATUS. The theory is that: The machine knows the start but not knowing the terminal. The paddle and door will move slowly from the start to terminal when calibrating. Then the motor’s encoders of paddle and door compute how far they move per step. (选择“TEST”工艺, 然后在 “VERIABLE PROCESS COMMAND” 界面中输入数据2550 和500。
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之后机台会自动做校正,但是我们需要在“SEVRO DRIVER STATUS”界面中监视校正的情 况。原理:机台知道起点但不知道终点,在校正过程中paddle 和炉门会慢慢从起点移动到终 点,走完全程后马达的encoder 计算出它每走一步需要走多远)

8. Change the 2550 to 0010 and start recipe. (将先前的数据2550 改为0010,然后开始工艺) 9. In the last, change the “TEST” recipe to a recipe which customer needs. This is very important. (最 后要将“TEST”工艺改为客户需要的工艺,这点很重要)

八 尾气瓶,尾气管及其附属设施的安装,Paddle TC,Spike TC 的安装
石英制品是易碎品,要注意轻拿轻放 为防止污染,操作时要戴无尘手套 炉管,炉门的安装要遵造 procedure

以下为关于尾气瓶 Installation 的说明,FYI (暂缺 )

以下为Pressure controller adjust的说明,FYI 1. Tune the adjusting knob using precision screwdriver and make sure the actual value of exhaust to be -2~-3.(用钟表起调整旋钮,使尾气实际值为-2~-3)
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2. Adjust the valve of input N2 and make sure the actual value of exhaust to be +1. (调整氮气阀,使尾气的实际值为+1)

以下为关于Paddle TC Installation 的说明,FYI 1: First, the DTC needs to use the paddle TC signals instead of the spike TC signals. This is done in the Tube control-sub menu-Assign control zones. Default the paddle inputs are assigned to control zone 0, meaning the paddle TC inputs are not used for temperature control. Changing the paddle inputs 1, 2, 3, (4 and 5 if applicable) to control zones 1, 2, 3, (4and 5) respectively will allow the DTC to use the paddle TC signals. 此为设定DTC 的输入信号为Paddle TC,并要设立正确的温区指向. ---------一般安装不需要设定, 2: Secondly, the paddle TC needs to be checked for correct functionality. Put the paddle TC connector labeled 1 into the connector labeled 1 on the rear of the furnace (old systems have connectors at the front side of the furnace) while keeping the paddle TC outside the furnace. Check on the touchscreen in Monitor Menu-sub menu-Main Detail Status that the paddle Actual value changes from 1499.9 (means open connection) to room temperature. Repeat this for all other connectors 2 to 3(5). 此为Paddle TC的好坏的检验, Paddle TC尾部线缆连接后,如果屏幕显示 1499.9,这是断路, 如果显示 0.这是短路
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----------这是安装后的检验 3: Thirdly, use a heatgun to test all 5 paddle thermocouples for correct functionality. Aim the heatgun at one particular TC for about 30 sec and monitor the temperature rise. If the temperature increases approximately 20
o

above room temperature the TC is working properly. Remove the paddle TC connectors 1-5 from the rear connectors and put the paddle TC in a secure place. 这是温度敏感性测试 ---------- 一般不需要检验,如果控温异常,可做此步骤 4: Finally make sure the paddle TC number 3 (center TC) is aligned to the center spike TC. Measure the distance between center spike TC and the end of the profile TC connection pipe on the tube. Adjust the PTFE paddle TC connector to the measured distance and tighten it. 这是安装重点,要保证Paddle TC和Spike TC测温中心点重合,需要测量,请参考下图,

具体做法可参考以下说明, 1: 先测量Spike TC 测温中心点到炉尾的距离,并记录为X 2: 再测量Paddle TC 测温中心点到Paddle TC 尾部的距离,并记录为Y ---------Paddle TC 露出炉管尾部的尺寸为,Y-X

以下为关于Spike TC的安装说明,FYI (暂缺 )

九 Paddle 的安装和调整
以下为关于Paddle的安装说明,FYI

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Content:
It has the sequence from upside to underside to install the paddle. This can avoid something breaking up the paddle that drops from upside. (装paddle 必须按照从上到下的顺序, 这样是为了 避 免不小心从上面掉下的东西撞到下面的paddle 上)

A. The rough installation.
1.At first, we should put some air cushion or other something on the bottom base in case something scratching the machine face that drops from upside. (首先,我们应该在下面的工作台 上放些气泡棉等,以防止不小心从上面掉下的东西撞到工作台上造成机台表面刮伤)

2.After taking off the cover of paddle head, at first turn over the fixing block. Secondly, loose top fixing screw and let nut at the top. Thirdly, loose front fixing screws in case that they bump the paddle when installing. (在拿掉loader station 外罩后,首先要将固定块翻转180 度,使平面向 下,然后松开上面和前面的固定螺丝)

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3.When installing paddle, we should make sure the paddle out of paddle head for about 5~7 cm. Then fix the top fixing screw and front fixing screws. (在安装paddle 时,要确保paddle 伸出5~7 cm,然后锁紧上面和前面的锁紧螺丝)

4.Let the paddle go to the low position by using keyboard. Then check the gap for about 1mm. This is very important, because it isn’t convenient for us to adjust the paddle if it is too small or too big. If it is not 1mm, we should adjust the LOW sensor to adjust the distance by keyboard. Once we adjust the LOW sensor, we need adjust the ZERO position for the ruler again. (使用keyboard 将 paddle 降到低位,然后使如图这个间隙大约为1mm, 这点很重要,因为这个距离太大太小都
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不便于我们去调paddle. 如果这个距离不是1mm,我们可以调整低位的sensor。一旦调整了 低位的sensor,我们需要调整刻度尺到0 的位置)

5. Adjust the 4ea screws which are at the bottom of paddle head to let the paddle horizontal. (调 整底部的4ea 螺丝使paddle 水平)

6.Move the paddle and let the its head above the tail gas tube. It is ok that the distance is about 10mm between the paddle and tail gas tube. If it is not ok, we should adjust the 4ea screws at the bottom of paddle head. If it is ok, we should move the paddle into the furnace and see the paddle whether to scratch the tail gas tube. (移动paddle 到尾气管的上面,确保它们之间的距离大概 在10mm。如果不是的话,需要调整底部的4ea 螺丝。没有问题后,把paddle 移到炉管内 部看paddle 是否有刮到尾气管,没有问题后将paddle 移出)

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7. Raise the paddle to height position (about15mm) by keyboard. Then put a boat filled with dummy wafer and the quartz baffle on the paddle. (用keyboard 把paddle 升到高位,然后把载 满dummy wafer 的舟和挡板放在paddle 上)

8.Move paddle into furnace to watch whether the 4ea boat feet and 8ea baffle feet can scratch the furnace. The best situation is that the 12ea feet are in the center of furnace. If not, we loose the 2ea fixing screws and adjust the base of paddle head. (把paddle 移到炉管内,看舟的4 个脚和 挡板的8 个脚是否有刮到炉管,最好的情况是这12 个脚在炉管的中心。如果不是的需要 松开paddle head 的2 个锁紧螺丝来调整paddle head 的位置。注意:在调整时要注意不要 力度过大,以免撞到paddle)

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9. Let the paddle go to the LOW position. Then take out the paddle to watch whether the paddle can scratch the boat and baffle. If the paddle scratches the boat or baffle, we should loose the 2ea fixing screws and adjust the base of the paddle head again. (把paddle 降到低位,然后把paddle 移出看paddle 是否碰到舟和挡板。如果撞到,需要松开paddle head 的2 个锁紧螺丝来调整 paddle head 的位置)

10.Let paddle move into the furnace at LOW position. Then carry the baffle and boat to the HIGH position. At last, let the paddle carry the baffle and boat out of furnace. At the same time, we still need watch whether the boat feet and baffle feet scratch furnace. (在低位把paddle 移进炉管, 然后把舟和挡板载到高位,接着把它们移出炉管。同时我们还要注意舟和挡板是否能刮到 炉管)

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十 Profile 和饱和测试
Profile 和饱和测试只要调入相应的 recipe 即可完成,难点在于做这些工作之前要进行一些相关 参数和外部条件的确认 外接气体压力确认 管路是否闭合 各机械部分是否正常 电气部分是否正常 相关校准是否完成 相关参数是否正确 以下为标准饱和 recipe Recipe TSC 6/24/2008 2:15:04 AM Tube : STACK: 04 [H3] 505POCL3

----------------------------------------------------------------------------------------------------------------------------SATURATE ----------------------------------------------------------------------------------------------------------------------------00 LOAD/UNLOAD Message LOAD WAFERS [4]. Sonalert alarm Yes Normal recipe 11 Zone1 800.0 C0 Slope 10.00 C0/min Zone2 10.00 C0/min Zone3 800.0 C0 Slope 10.00 C0/min Zone4 800.0 C0 Slope 10.00 C0/min Slope 10.00 C0/min , profile table A

800.0 C0 Zone5

Slope

800.0 C0

Boat to 10.0 mm at 600.0 mm/min with oscillation speed of 0.0 mm/min. Variable Command: No Gas N2 [1] at 5.0 [slm ] Variable Command: No Gas O2-LOW [3] at 0 [sccm] Variable Command: Gas N2 POCL3 [7] at 0 [sccm] Variable Command: No No

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Gas TMPPOCL3 [8] at 21.0 [degr]

Variable Command:

No

Digital out ,,,POCL3VLV[12] = OFF,,,,

Variable Command: No

Alarm Limit Setting for All Analog Output Channel at 0 % Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,,,,,TEMP SCR[7] = ON,OVERHEAT[8] = ON Alarm on digital in FANSWTCH[9] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = ON,EXHAUST[16] = ON 01 LOAD IN Message BOAT IN [2]. Sonalert alarm No Time: 000:08:00 (hr:min:sec) Variable Command: No ON,TEMPPOCL[10] =

800.0 C0 Zone5

Slope

800.0 C0

Normal recipe 01 Zone1 800.0 C0 Slope 10.00 C0/min Zone2 10.00 C0/min Zone3 800.0 C0 Slope 10.00 C0/min Zone4 800.0 C0 Slope 10.00 C0/min Slope 10.00 C0/min , profile table A

Boat to 2450.0 mm at 600.0 mm/min with oscillation speed of 10.0 mm/min. Variable Command: No Gas N2 [1] at 20.0 [slm ] Variable Command: No Alarm on digital in FANSWTCH[9] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = OFF,EXHAUST[16] = ON Wait for boat to reach setpoint Abort recipe 03 02 PADDLE OUT -----------------------------------------------------------------------------------------------------------------------SATURATE
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ON,TEMPPOCL[10]

=

贰拾捌

Kromax international (ShangHai) Corp

---------------------------------------------------------------------------------------------------------------------------Message BOAT OUT [3]. Sonalert alarm No Normal recipe 02 Zone1 750.0 C0 Slope 10.00 C0/min Zone2 10.00 C0/min Zone3 750.0 C0 Slope 10.00 C0/min Zone4 750.0 C0 Slope 10.00 C0/min Slope 10.00 C0/min , profile table A Time: 000:08:00 (hr:min:sec) Variable Command: No

750.0 C0 Zone5

Slope

750.0 C0

Boat to 10.0 mm at 1000.0 mm/min with oscillation speed of 0.0 mm/min. Variable Command: No Wait for boat to reach setpoint Abort recipe 02 03 RECOVERY Message STABILIZE [8]. Sonalert alarm No Time: 000:20:00 (hr:min:sec) Gas [N2 [1]] at [6.0] [slm ] Variable Command: Variable Command: No Yes Yes Yes

Gas [O2-LOW [3]] at [0] [sccm] Variable Command: Gas [N2 POCL3 [7]] at [0] [sccm] Variable Command: Digital out ,,,POCL3VLV[12] = OFF,,,,

Variable Command: No Variable Command:

Alarm limit setting for Gas N2 [1] at 10 % ( ?3.0 slm ) No Alarm on digital in FANSWTCH[9] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = ON,EXHAUST[16] = ON

ON,TEMPPOCL[10]

=

Branch on gas/pressure O2-LOW [3] to step PADDLE IN. Sonalert alarm Yes
R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120 Tel :86-21-6160-9128 Fax:86-21-6160-9118

贰拾玖

Kromax international (ShangHai) Corp

Branch on gas/pressure N2 POCL3 [7] to step PADDLE IN. Sonalert alarm Yes Branch on digital input EXHAUST [16] to step POSTPURGE. Sonalert alarm Yes Wait for temp 839 (C0) at load Zone Abort recipe 01 04 STABILIZE Message STABILIZE [8]. Sonalert alarm No Time: [000:05:01] (hr:min:sec) Variable Command: Yes

Branch on digital input EXHAUST [16] to step POSTPURGE. Sonalert alarm Yes 05 PREPURGE Message PREPURGE [9]. Sonalert alarm No SATURATE ---------------------------------------------------------------------------------------------------------------------------Gas *EXHAUST [6] at 1 [Pa ] Variable Command: No Time: [000:02:00] (hr:min:sec) Variable Command: Yes

750.0 C0 Zone5

Slope

750.0 C0

Normal recipe 02 Zone1 750.0 C0 Slope 10.00 C0/min Zone2 10.00 C0/min Zone3 750.0 C0 Slope 10.00 C0/min Zone4 750.0 C0 Slope 10.00 C0/min Slope 10.00 C0/min , profile table A Gas [N2 [1]] at [6.0] [slm ] Variable Command: Yes Yes

Gas [O2-LOW [3]] at [200] [sccm] Variable Command:

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾

Kromax international (ShangHai) Corp

Gas [N2 POCL3 [7]] at [800] [sccm] Variable Command:

Yes

Branch on digital input EXHAUST [16] to step POSTPURGE. Sonalert alarm Yes 06 POCL3 DEP Message DEPOSITION [13]. Sonalert alarm No Time: [000:23:00] (hr:min:sec) Variable Command: Yes

Digital out ,,,POCL3VLV[12] = ON,,,,

Variable Command: No Variable

Alarm limit setting for Gas O2-LOW [3] at 10 % ( ?200 sccm) Command: No Alarm limit setting for Gas N2 POCL3 [7] at 10 % ( ?200 sccm) Command: No

Variable

Alarm on digital in FANSWTCH[9] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = ON,,,DOORCLSD[15] = ON,EXHAUST[16] = ON

ON,TEMPPOCL[10]

=

Branch on gas/pressure O2-LOW [3] to step POSTPURGE. Sonalert alarm Yes Branch on gas/pressure N2 POCL3 [7] to step POSTPURGE. Sonalert alarm Yes Branch on digital input O2-LOW [12] to step POSTPURGE. Sonalert alarm Yes Branch on digital input EXHAUST [16] to step SYSTEMSTOP. Sonalert alarm Yes 07 POSTPURGE Message POSTPURGE [11]. Sonalert alarm No Time: [000:05:00] (hr:min:sec) Normal recipe 11 Zone1 Variable Command: Slope Yes Zone2

800.0 C0

10.00 C0/min

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾壹

Kromax international (ShangHai) Corp

800.0 C0 Zone5

Slope

800.0 C0

10.00 C0/min Zone3 800.0 C0 Slope 10.00 C0/min Zone4 800.0 C0 Slope 10.00 C0/min , profile table A Gas N2 [1] at 20.0 [slm ] Variable Command: No

Slope 10.00 C0/min

Gas O2-LOW [3] at 1000 [sccm] Variable Command: No -----------------------------------------------------------------------------------------------------------------------SATURATE ---------------------------------------------------------------------------------------------------------------------------Gas N2 POCL3 [7] at 1000 [sccm] Variable Command: No Digital out ,,,POCL3VLV[12] = OFF,,,, Variable Command: No ON,TEMPPOCL[10] =

Alarm on digital in FANSWTCH[9] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = ON,EXHAUST[16] = ON

Alarm Limit Setting for All Analog Output Channel at 0 % 08 Message STANDBY [1]. Sonalert alarm No Boat to 20.0 mm at 300.0 mm/min with oscillation speed of 10.0 mm/min. Variable Command: No Alarm on digital in FANSWTCH[9] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = ON,,,DOORCLSD[15] = OFF,EXHAUST[16] = ON Time: 000:05:00 (hr:min:sec) 09 Message STANDBY [1]. Sonalert alarm No Branch loop for 10.0 times to step PADDLE OUT. Sonalert alarm No
R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120 Tel :86-21-6160-9128 Fax:86-21-6160-9118

ON,TEMPPOCL[10]

=

Variable Command:

No

叁拾贰

Kromax international (ShangHai) Corp

10 PADDLE IN Message BOAT IN [2]. Sonalert alarm No Time: 000:08:00 (hr:min:sec) Variable Command: No

Boat to 2450.0 mm at 600.0 mm/min with oscillation speed of 0.0 mm/min. Variable Command: No Gas N2 [1] at 20.0 [slm ] Variable Command: No Gas O2-LOW [3] at 0 [sccm] Variable Command: Gas N2 POCL3 [7] at 0 [sccm] Variable Command: Digital out ,,,POCL3VLV[12] = OFF,,,, No No

Variable Command: No

Alarm Limit Setting for All Analog Output Channel at 0 % Alarm on digital in FANSWTCH[9] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = OFF,EXHAUST[16] = ON Wait for boat to reach setpoint Abort recipe 02 11 LOAD OUT Message BOAT OUT [3]. Sonalert alarm No -----------------------------------------------------------------------------------------------------------------------SATURATE ---------------------------------------------------------------------------------------------------------------------------Time: 000:08:00 (hr:min:sec) Variable Command: No Boat to 10.0 mm at 600.0 mm/min with oscillation speed of 10.0 mm/min. Variable Command: No ON,TEMPPOCL[10] =

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾叁

Kromax international (ShangHai) Corp

Wait for boat to reach setpoint Abort recipe 03 12 RETURN Message STANDBY [1]. Sonalert alarm No Branch always to step LOAD/UNLOAD. Sonalert alarm No 13 SYSTEMSTOP Message STANDBY [1]. Sonalert alarm No Normal recipe 11 Zone1 800.0 C0 Slope 10.00 C0/min Zone2 10.00 C0/min Zone3 800.0 C0 Slope 10.00 C0/min Zone4 800.0 C0 Slope 10.00 C0/min Slope 10.00 C0/min , profile table A

800.0 C0 Zone5

Slope

800.0 C0

Boat to 10.0 mm at 600.0 mm/min with oscillation speed of 10.0 mm/min. Variable Command: No Gas N2 [1] at 0.0 [slm ] Variable Command: No Gas O2-LOW [3] at 0 [sccm] Variable Command: Gas N2 POCL3 [7] at 0 [sccm] Variable Command: Gas TMPPOCL3 [8] at 20.0 [degr] No No No

Variable Command:

Digital out ,,,POCL3VLV[12] = OFF,,,,

Variable Command: No

Alarm Limit Setting for All Analog Output Channel at 0 % Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,,,,,TEMP SCR[7] = ON,OVERHEAT[8] = ON Alarm on digital in FANSWTCH[9] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = ON,EXHAUST[16] = ON ON,TEMPPOCL[10] =

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾肆

Kromax international (ShangHai) Corp

Wait for operator 以下为Pressure controller adjust的说明,FYI 1. Turn off the N2 switch (关闭氮气开关)
N2 switch

2. Turn the adjusting knob using precision screwdriver and make sure the actual value of exhaust to be -2~-3.(用钟表起调整旋钮,使尾气实际值显示为-2~-3)

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾伍

Kromax international (ShangHai) Corp

3. Adjust the valve of input N2 and make sure the actual value of exhaust to be +1. (调整氮气阀,使尾气的实际值显示为+1)

4.

End (结束)

十一: 工艺调整 工艺主要参数 Temp. setting: Load/unload Temp. Process Temp. Gas flux setting: Time setting: Hardware setting Process control

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾陆

Kromax international (ShangHai) Corp

Susceptible
Temp.

main parameter

易变因素,决定了扩散系数的大小,对工艺的影响最大

Time: 一般不易偏差,取决于时钟的精确度。

Process order 先氧化后推阱与先推阱后氧化得出的表面浓度就不同,因此阱电阻 就会有很大的差别

Exhaust&Gas flux 排风:对炉管的片间均匀性,尤其是炉口有较大的影响。 气体流量:气体流量的改变会影响氧化膜厚,从而使表面浓度产生 变化,直接影响器件的电参数.

以下为标准 55 欧姆+/-5 工艺 RECIPE
Recipe TSC Tube : STACK: 02 [B2] ETONPOCL

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾柒

Kromax international (ShangHai) Corp

3/1/2007 11:24:49 PM -----------------------------------------------------------------------------------------------------------------------------55 6 INC -----------------------------------------------------------------------------------------------------------------------------00 LOAD/UNLOAD Message LOAD WAFERS [4]. Sonalert alarm Yes Normal recipe 00 Zone1 800.0 C0 Slope 10.00 C0/min Zone3 800.0 C0 Slope 10.00 C0/min Zone4 800.0 C0 Slope 10.00 C0/min , profile table A Slope 10.00 C0/min Slope Zone2 800.0 C0 Zone5

800.0 C0

10.00 C0/min

Boat to 10.0 mm at 600.0 mm/min with oscillation speed of 0.0 mm/min. Command: No Gas N2 [1] at 5.0 [slm ] Variable Command: No Variable Command: Variable Command: No No No No

Variable

Gas O2-LOW [3] at 0 [sccm] Gas N2 POCL3 [7] at 0 [sccm]

Gas TMPPOCL3 [8] at 21.0 [degr]

Variable Command:

Digital out ,,,POCL3VLV[12] = OFF,,,,

Variable Command:

Alarm Limit Setting for All Analog Output Channel at 0 % Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,,,,,TEMP SCR[7] = ON,OVERHEAT[8] = ON Alarm on digital in FANSWTCH[9] = ON,TEMPPOCL[10] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = ON,EXHAUST[16] = ON 01 LOAD IN Message BOAT IN [2]. Sonalert alarm No Time: 000:08:00 (hr:min:sec) Variable Command: No

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾捌

Kromax international (ShangHai) Corp

Normal recipe 01 Zone1 850.0 C0 Slope 10.00 C0/min Zone3 845.0 C0 Slope 10.00 C0/min Zone4 840.0 C0 Slope 10.00 C0/min , profile table A

Slope

10.00 C0/min Slope

Zone2

847.0 C0 Zone5

840.0 C0

10.00 C0/min

Boat to 2450.0 mm at 600.0 mm/min with oscillation speed of 10.0 mm/min. Command: No Gas N2 [1] at 20.0 [slm ] Variable Command: No

Variable

Alarm on digital in FANSWTCH[9] = ON,TEMPPOCL[10] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = OFF,EXHAUST[16] = ON Wait for boat to reach setpoint Abort recipe 03 02 PADDLE OUT ----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------1/5

55 6 INC ----------------------------------------------------------------------------------------------------------------------------Message BOAT OUT [3]. Sonalert alarm No Time: 000:05:00 (hr:min:sec) Variable Command: No

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

叁拾玖

Kromax international (ShangHai) Corp

Boat to 10.0 mm at 1000.0 mm/min with oscillation speed of 0.0 mm/min. Command: No Wait for boat to reach setpoint Abort recipe 02 03 RECOVERY Message STABILIZE [8]. Sonalert alarm No Time: 000:20:00 (hr:min:sec) Gas [N2 [1]] at [6.0] [slm ] Variable Command: No

Variable

Variable Command: Yes Variable Command: Variable Command: Yes Yes No No

Gas [O2-LOW [3]] at [0] [sccm] Gas [N2 POCL3 [7]] at [0] [sccm]

Digital out ,,,POCL3VLV[12] = OFF,,,,

Variable Command:

Alarm limit setting for Gas N2 [1] at 10 % ( ?3.0 slm )

Variable Command:

Alarm on digital in FANSWTCH[9] = ON,TEMPPOCL[10] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = ON,EXHAUST[16] = ON Branch on gas/pressure O2-LOW [3] to step PADDLE IN. Sonalert alarm Yes Branch on gas/pressure N2 POCL3 [7] to step PADDLE IN. Sonalert alarm Yes Branch on digital input EXHAUST [16] to step POSTPURGE. Sonalert alarm Yes Abort recipe 01 04 STABILIZE Message STABILIZE [8]. Sonalert alarm No Time: [000:05:00] (hr:min:sec) Variable Command: Yes

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

肆拾

Kromax international (ShangHai) Corp

Branch on digital input EXHAUST [16] to step POSTPURGE. Sonalert alarm Yes 05 PREPURGE Message PREPURGE [9]. Sonalert alarm No Time: [000:02:00] (hr:min:sec) Variable Command: Gas *EXHAUST [6] at -1 [Pa ] Variable Command: Yes No

Gas [N2 [1]] at [8.0] [slm ] Variable Command: Yes --------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------2/5

55 6 INC ----------------------------------------------------------------------------------------------------------------------------Gas [O2-LOW [3]] at [200] [sccm] Variable Command: Yes Gas [N2 POCL3 [7]] at [800] [sccm] Variable Command: Yes

Branch on digital input EXHAUST [16] to step POSTPURGE. Sonalert alarm Yes 06 POCL3 DEP Message DEPOSITION [13]. Sonalert alarm No Time: [000:23:00] (hr:min:sec) Variable Command: Digital out ,,,POCL3VLV[12] = ON,,,, Yes No

Variable Command:

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

肆拾壹

Kromax international (ShangHai) Corp

Alarm limit setting for Gas O2-LOW [3] at 10 % ( ?200 sccm) Alarm limit setting for Gas N2 POCL3 [7] at 10 % ( ?200 sccm)

Variable Command: Variable Command:

No No

Alarm on digital in FANSWTCH[9] = ON,TEMPPOCL[10] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = ON,,,DOORCLSD[15] = ON,EXHAUST[16] = ON Branch on gas/pressure O2-LOW [3] to step POSTPURGE. Sonalert alarm Yes Branch on gas/pressure N2 POCL3 [7] to step POSTPURGE. Sonalert alarm Yes Branch on digital input O2-LOW [12] to step POSTPURGE. Sonalert alarm Yes Branch on digital input EXHAUST [16] to step SYSTEMSTOP. Sonalert alarm Yes 07 POSTPURGE Message POSTPURGE [11]. Sonalert alarm No Time: [000:05:00] (hr:min:sec) Variable Command: Gas N2 [1] at 20.0 [slm ] Variable Command: No No No No Yes

Gas O2-LOW [3] at 1000 [sccm] Gas N2 POCL3 [7] at 1000 [sccm]

Variable Command: Variable Command:

Digital out ,,,POCL3VLV[12] = OFF,,,,

Variable Command:

Alarm on digital in FANSWTCH[9] = ON,TEMPPOCL[10] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = ON,EXHAUST[16] = ON Alarm Limit Setting for All Analog Output Channel at 0 % 08 PADDLE IN Message BOAT IN [2]. Sonalert alarm No Time: 000:05:00 (hr:min:sec) Variable Command: No

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

肆拾贰

Kromax international (ShangHai) Corp

--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------3/5

55 6 INC ----------------------------------------------------------------------------------------------------------------------------Boat to 2450.0 mm at 600.0 mm/min with oscillation speed of 0.0 mm/min. Variable Command: No Gas N2 [1] at 20.0 [slm ] Variable Command: No No No 10.00 C0/min Slope Zone2 800.0 C0 Zone5

Gas O2-LOW [3] at 0 [sccm] Gas N2 POCL3 [7] at 0 [sccm]

Variable Command: Variable Command: Slope

Normal recipe 00 Zone1 800.0 C0 Slope 10.00 C0/min Zone3 800.0 C0 Slope 10.00 C0/min Zone4 800.0 C0 Slope 10.00 C0/min , profile table A Digital out ,,,POCL3VLV[12] = OFF,,,,

800.0 C0

10.00 C0/min

Variable Command:

No

Alarm Limit Setting for All Analog Output Channel at 0 % Alarm on digital in FANSWTCH[9] = ON,TEMPPOCL[10] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = OFF,EXHAUST[16] = ON Wait for boat to reach setpoint
R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120 Tel :86-21-6160-9128 Fax:86-21-6160-9118

肆拾叁

Kromax international (ShangHai) Corp

Abort recipe 02 09 LOAD OUT Message BOAT OUT [3]. Sonalert alarm No Time: 000:06:00 (hr:min:sec) Variable Command: No Variable

Boat to 10.0 mm at 600.0 mm/min with oscillation speed of 10.0 mm/min. Command: No Wait for boat to reach setpoint Abort recipe 03 10 RETURN Message STANDBY [1]. Sonalert alarm No Branch always to step LOAD/UNLOAD. Sonalert alarm No 11 SYSTEMSTOP Message STANDBY [1]. Sonalert alarm No Normal recipe 00 Zone1 800.0 C0 Slope 10.00 C0/min Zone3 800.0 C0 Slope 10.00 C0/min Zone4 800.0 C0 Slope 10.00 C0/min , profile table A Slope 10.00 C0/min Slope Zone2

800.0 C0 Zone5

800.0 C0

10.00 C0/min

Boat to 10.0 mm at 600.0 mm/min with oscillation speed of 10.0 mm/min. Command: No

Variable

Gas N2 [1] at 0.0 [slm ] Variable Command: No --------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------4/5

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118

肆拾肆

Kromax international (ShangHai) Corp

55 6 INC ----------------------------------------------------------------------------------------------------------------------------Gas O2-LOW [3] at 0 [sccm] Variable Command: No Gas N2 POCL3 [7] at 0 [sccm] Variable Command: No No No

Gas TMPPOCL3 [8] at 20.0 [degr]

Variable Command:

Digital out ,,,POCL3VLV[12] = OFF,,,,

Variable Command:

Alarm Limit Setting for All Analog Output Channel at 0 % Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,,,,,TEMP SCR[7] = ON,OVERHEAT[8] = ON Alarm on digital in FANSWTCH[9] = ON,TEMPPOCL[10] = ON,LEVLPOCL[11] = ON,O2-LOW[12] = OFF,,,DOORCLSD[15] = ON,EXHAUST[16] = ON Wait for operator

R1005,No.620 ZhangYang Road, Shanghai,P.R.C. Code: 200120

Tel :86-21-6160-9128 Fax:86-21-6160-9118


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