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VEECO Mark II+ 离子源技术资料


Mark II+ Ion Source

Exclusive distributor: Sunnet Systems Inc. Cell: +86 1 Contact: Carl Jin

Mark II+ Ion Source - Overview
Ion Source Improvements
Faster Mai

ntenance Greater Performance Smaller Form Factor

Configurations
Radiation cooled (<900W), Filament Cathode Water cooled (<1500W), Filament Cathode Water cooled (<3000W), Hollow Cathode Anode Assembly Sold Separately (for each)

New Feedthrough, Vacuum Leads & Power Cable
Improved Design for greater reliability

?2006 Veeco Instruments Inc.

Mark II+ - Improved End-Hall Source
Features of the Mark II+ ? Removable, indirectly-cooled anode sub-assembly with thermal transfer to water-cooled partition plate[2] ? Common components for radiationand water-cooled options ? Serviceable anode and front plate components are easily removed and quickly replaced without disrupting water, gas or electrical services ? Lower temperature and wear rates of consumable gas distribution plate
[2] Patent Pending: D. Burtner, et. al., “Fluid Cooled Ion Source”, US Patent Application No. 20050248284, Nov. 11, 2005.

Anode Assembly (all consumables)

Electric

Gas

Water

Mark II+: Filament Cathode, Water-Cooled

?2006 Veeco Instruments Inc.

Mark II+ Maintenance Improvements

Double click image to start video

?2006 Veeco Instruments Inc.

Mark II+ - Ion Beam Current Density Profiles
Argon beam current densities of the Mark II+ are relatively higher and are more broadly distributed when compared to the earlier Mark II. Beam Current measured in oxygen (not shown) show similar results.
Beam Current Density (mA/cm2)
0.8 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0 -90 -75 -60 -45 -30 -15 0 15 30 45 60 75 90
MII 100V MII 200V MII 300V MII+ 100V MII+ 200V MII+ 300V

Angle θ (degrees)
Ji(θ) for Mark II and Mark II+ sources (Water-cooled w/ Hot-filament) at R=30 cm, in argon at IA = 5A and at various anode potentials.
?2006 Veeco Instruments Inc.

Mark II+ Performance
Improvements
Increased Total Beam Current
(at comparable discharge conditions)
1600 1400

Ion beam current, Ib, mA

Mark II + Mark II

1200 1000 800 600 400 200 0

? Argon ? Filament Neutralizer ? 5 Amp Discharge

0

50

100

150

200

250

300

350

Discharge voltage, Vd, V

?2006 Veeco Instruments Inc.

Mark II+ Performance Improvements
Increased Total Beam Current
(at comparable discharge conditions)
3500

Ion beam current, Ib, mA

3000 2500 2000 1500 1000 500 0

Mark II +

Mark II

? Oxygen ? Hollow Cathode Neutralizer ? 10 Amp Discharge (Anode)

0

50

100

150

200

250

300

350

Discharge (anode) voltage, Vd, V

?2006 Veeco Instruments Inc.

Total Beam Current and Gas Utilization
Beam Current / Input flow (mA/sccm)

? When using the Mark II+ to replace the Mark II, users can reduce IA by 10-30% to achieve similar process results.

Beam Current (A)

? Examination of IB/(input gas flow) shows that the Mark II+ has superior gas utilization, up by 10-40%.

2

200

1.5

150

1

100

0.5 MII (I) MII (I/flow) 0 50 100 150 200 250 300 350 MII+ (I) MII+ (I/flow)

50

0

Anode Potential (V)
IB and IB/(input gas flow) for Mark II and Mark II+ sources (Water-cooled w/ Hot-filament) in argon at IA = 5A and at various anode potentials.

?2006 Veeco Instruments Inc.

Mark II+ General Improvements
Smaller Form Factor
(shorter with the same diameter)

16.1 cm 10.8 cm

Mark II
?2006 Veeco Instruments Inc.

Mark II+

New Feedthroughs, Vacuum Leads and Power Supply Cables

? New Retrofit for older Mark II sources as well

Mark II+ Ion Source Keyed Shielded

Pre-connected lead assemblies (no need to disconnect for maintenance)

?2006 Veeco Instruments Inc.

New Feedthroughs, Vacuum Leads and Power Supply Cables
Vacuum Atmosphere

? Insulated electrical contacts eliminates arcing ? Keyed connectors speed installation and eliminates wiring errors

?2006 Veeco Instruments Inc.

Configuration 1 Radiation-Cooled / Filament Cathode

What else is Different?

Product Part Number Max. Beam Current Anode Material Mounting Config. Weight (internal mt)

Mark II 29968 1.0 Amp Graphite, SS Internal, Flange 6.4 kg (14.1 lbs)

Mark II+ 426668 1.5 Amps (Ar) Stainless Steel Internal 5.9 kg (13 lbs)

?2006 Veeco Instruments Inc.

Configuration 2 Water-Cooled / Filament Cathode

What else is Different?

Product Part Number Max. Beam Current Minimum Cooling Water Anode Material Mounting Configuration Weight (internal mount)

Mark II 4000 1.0 Amp > 3 l/min (.8 gpm) Graphite, SS Internal, Flange 6.4 kg

Mark II+ 426663 1.5 Amps (Ar) > 1.5 l/min (.4 gpm)* Stainless Steel Internal 5.9 kg (13 lbs)

* Inc. ?2006 Veeco Instruments High

resistivity water not required

Configuration 3 Water-Cooled / Hollow Cathode

Product Model Number Max. Beam Current

What else is Different?

Cooling Water Anode Material Mounting Config. Weight (internal mt)

Mark II 4000 2 Amps (MII+ HO) 3 Amps (MIII+) > 3 l/min (.8 gpm) Graphite, SS Internal, Flange 6.4 kg

Mark II+ 427073 2.4 Amps (MII+ HO) 3.5 Amps (MIII+) > 1.5 l/min (.4 gpm) Stainless Steel Internal 5.9 kg (13 lbs)

?2006 Veeco Instruments Inc.

Mark II+ Summary
A new series of gridless, end-Hall Ion Sources (Mark II+) has been produced with improved features
A modular anode assembly and indirect water-cooling option for quick preventative maintenance turn-around and lower overall part count Increased output efficiencies for a given input power and gas flow

Performance studies comparing the earlier Mark II and new Mark II+ show
A 20-70% increase in total beam current, broader spatial output and A 10-40% improvement in gas utilization, Very similar ion current energy distribution and charge-state properties of the ion beam, Improved thermal management of critical components
cooler magnet for better source stability cooler gas distribution plate for reduce wear and longer lifetime

?2006 Veeco Instruments Inc.


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